Fast rigorous simulator for DUV and EUV lithography: We are Fastlitho

Rigorous simulation is essential for advanced lithography, both DUV and EUV. Fastlitho offers the fastest and most accurate rigorous simulation software in the industry.

Our Services

Rigorous Simulation Software for DUV and EUV Lithography

There is no need to trade accuracy for speed: You can now have both.

Custom Software Solution

We can customize our software for integration into your in-house process flow.


We also offer lithography-simulation related consulting service.

Rigorous Simulator

Our rigorous simulator can be run from a GUI or called from any scripting language of your choice.

Rigorous Lithography Simulation Software

Custom Software Solution

Our rigorous simulator can be used for mask-inspection and scatterometry simulation too.

Custom Software Solution


If you have a lithography-simulation project but do not wish to do the simulation yourself, we can do it for you.


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Contact us

If you have any question, get in touch by email or phone.